BSEM-801 is a Field Emission Gun Scanning Electron Microscope. It has excellent imaging quality capabilities. It has More than six preset extend interface for accessories such as WDS, EDS, EBSD, etc. It helps users to characterize specimens and explore the world of microscopic imaging and analysis.

1.Specification

Resolution: 1.5nm@15KV (SE), 3nm@30KV (BSE)

Magnification: 8-800000X 

Electron Gun: Schottky field emission gun

Accelerating Voltage: 0.2-30kV

Lens System: Multilevel high performance conical objective system

Objective Aperture: Three objective apertures adjustable outside the vacuum system, replacing without disassemble lens

Vacuum System: 1 set ion pump, 1 TMP, 1 mechanical pump. Specimen chamber vacuum better than 6.0E-4 Pa, electron gun vacuum better than 2E-7Pa, automatic vacuum control with vacuum interlock in order to avoid mis-operation

Detector: High vacuum secondary electron detector (SE), Integrated back scattering detector (BSE), IRCCD

More than six preset extend interface for accessories such as WDS, EDS, EBSD, etc.

2.5 axis motorized stage

Five-axis eucentric motorized stage: X=80mm, Y=50mm, Z=30mm, T=-5°~+70°, R=360°.

Max loadable sample: Ф175mm. Max height: 40mm.

Touching alarm and auto-stop, in case of mis-operation.

3.Image Processing

4096*3072 pixels display. Image Format: TIF, BMP, GIF, JPG, PNG. Automatic recording digital movie: (avi) function.

4.Work station

PC Workstation (Customized upon request). Image can be saved at hard or other storage medium, or printout.

Commercial workstation, Intel Xeon; 16G RAM+500G SSD+1TB graphics card, P1000 (independent graphics card -4G) +232 interface, 24” Monitor, wireless keyboard & mouse. Windows 10 operating system available in both Chinese and English language, images can be saved at external hard drive or print out.

5.Image Display

Frame averaging function, line average function, rich image hierarchy, rich image hierarchy, real-time display magnification, scale plate, acceleration voltage, grey curve.

6.Software Control

High voltage integrated commission, Automatic filament on/off, Potential shift regulation, Brightness adjustment, Electric to central adjustment, Automatic brightness, Contrast adjustment,   Objectives adjustment, Auto focus, Magnification adjustment, Objective degaussing, Automatic astigmatism elimination, Selected area scanning mode, Electric rotation adjustment, Management of microscope parameters, Point scanning mode, Electron beam displacement adjustment, Real time display of scanning field size, Line scanning mode, Electron beam tilt adjustment, Gun lens adjustment, Surface scanning, Scanning speed adjustment, Multichannel input, High voltage power monitoring, Swing centering, Tape measure, etc.

1.Power supply requirements

Voltage: AC 220V ± 10%, 50Hz ± 1 Hz, standard sine wave.

It is not recommended to share the power supply line with the instrument for equipment with high power and large power consumption change.

Three power sockets needed for: Scanning electron microscope instrument body. Computer: AC 220V, 50Hz, 16A. Mechanical pump and air compressor: AC 220V, 50Hz, 16A.

Independent ground, make sure ground resistance less than 3Ω.

Power supply: AC 220V (+7%-10%), 50Hz (±1%). Air switch: 63A.

2.Environmental requirements for installation site

Temperature between 16-30°C is recommended. The relative humidity shall be less than 60%.

Recommend configuration: air conditioner, dehumidifier and other equipment that can ensure the temperature and humidity of the laboratory.

Noise: <68 DB.

The durability of the instrument operation: continuously working.

Vibration from any direction less than 3μm (P-P) at the instrument installed location.

Magnetic field from any direction less than 2×10^-7T (2mG, P-P).

Instrument install location suggest first floor/ground floor stay away from railway, subway, main road as well as magnetic interference sources such as transformer equipment and high-frequency equipment.

Clean nitrogen (99.9%).

• To fulfill above environment condition is the key factor to reach the best performance of the instrument.

3.Instrument Dimension & Weight

Microscope body: 800mm*800mm*1480mm

Working table: 1340mm*850mm*740mm

Total weight: 450kg

Total power: 3kW

The floor bearing capacity should ≥ 500kg/m³, and it is recommended to place it on the first floor.

Note: ● Standard Outfit, ○ Optional

Silicon-based carbon material

Lithium iron phosphate

Graphene

PN junction

Etching layers for microchips

Line width measurement